Steven Danyluk

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Home Department: 
College of Engineering
Email: 
steven.danyluk@me.gatech.edu
Phone: 
404-894-9100

Dr. Danyluk began at Tech in 1993 as a Professor and Morris M. Bryan, Jr. Chair in Mechanical Engineering for Advanced Manufacturing Systems. Prior, he was an Associate Professor and Professor at the University of Illinois at Chicago and founder and director of the Manufacturing Research Center. In 1995, he became the Director of the Manufacturing Research Center at Georgia Tech.

Research

Dr. Danyluk's research has involved the measurement of the mechanical properties of semiconductors and the development of methods to measure the damage in these materials when they are processed. For example, he has been interested in wafering, lapping, grinding, dicing, and polishing of silicon and gallium arsenide. These processing methods involve deformation by diamond-impregnated tools flooded with lubricants, which is the domain of tribology. Dr. Danyluk has used electron and optical microscopy to examine the damage caused by this processing, and has developed electrical methods to probe this damage that is not visible by microscopy. In the course of this research, Dr. Danyluk has ongoing research in the measurement of residual stresses by optical methods, and the development of sensors to probe the chemistry of surfaces.

His research interests include the mechanisms of polishing, as applied to silicon, and the development of noncontact methods to measure surface chemistry. His career has been devoted to the study of interfaces and the mechanical consequences of the contact of these interfaces. Dr. Danyluk is currently funded by the Office of Naval Research, the National Science Foundation, and a number of industrial companies.